Enhance 88 track system: Coater and Developer
Wafer size: 2 inch to 6 inch wafer
Application using embedded software with Graphic User Interface (GUI) computer display
System featured with a generic nerve-networking using Ethernet
Providing user interface that graphically shows the current status of the whole system
Teach mode, calibrations, and components exercise functions
Providing process performance up to sub-micron process
Unlimited recipe with a lot new features. High performance and low cost of ownership.
Enhance and upgrade on customer side available