Dual Tracks for Mass Production
(2 Coaters, 2 Developers)

The PCT-200CRS (2C-2D) system is configured with full load modules, including 4 spin stations, Primer, hot plate ovens, chill plates, and high-capacity indexers. It features dual robot arms and dual end-effector handlers, stack-up modules, and automatic wafer size adjustments, making it well-suited for high workloads in wafer manufacturing.

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Additionally, the system is equipped with dual PCs, monitors, and PLC controllers, ensuring stable and independent operation for each track.

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Designed with a focus on high productivity, reliability, and throughput, the PCT-200CRS also emphasizes footprint reduction, user-friendliness, flexible process flow, and various interface tools. It complies with SECs/GEM standards and offers easy maintenance, chemical conservation, and energy efficiency.